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The present invention relates to a photomask, and more particularly, to a photomask having an organic resist pattern and a method of forming a resist pattern.
2. Description of the Related Art
Typically, a photomask is used to directly form an extremely fine line pattern in a semiconductor process. Thus, a mask pattern formed on the photomask is transferred to an underlying layer formed on a semiconductor substrate.
In general, an organic resist has been widely used as a mask pattern material, because it is relatively easily formed into a pattern having a desired size. However, an organic resist has a disadvantage in that it is not easily dissolved in a developing solution. Also, when the pattern is cured at a high temperature, such as in a post-exposure baking step, the organic resist may be damaged or deformed.
To solve these problems, a method of using an inorganic resist has been studied. For example, U.S. Pat. No. 5,739,118 discloses a method of forming a mask pattern using a patterning process using an inorganic resist, which includes the steps of applying a thin film of a negative resist onto a substrate, forming a resist pattern by an irradiation process using an exposing mask, and developing the resist pattern by a developing process. The method further includes the steps of etching the substrate using the resist pattern as a mask, and transferring a pattern to the substrate by an ashing process. In addition, U.S. Pat. No. 5,955,533
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